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Search publications by topic, publication type, advisor, author, or keywords by selecting the criteria below.
Search publications by topic, publication type, advisor, author, or keywords by selecting the criteria below.
Title | Author | Year | Publication type |
---|---|---|---|
Large Displacement Electrostatic Microactuators With Polysilicon Flexure Suspensions | Reid Alyn Brennen; Albert P. Pisano; Roger T. Howe; Homayoon Kazerooni | 1993 | Ph.D. Dissertation |
Controlled Structure Release for Silicon Surface Micromachining | David Monk; David S. Soane; Roger T. Howe; David B. Graves | 1993 | Ph.D. Dissertation |
High-Senstivity Micromechanical Electrostatic Voltmeter | David Loconto; Richard S. Muller; Roger T. Howe | 1992 | Master's Thesis |
A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry | Weijie Yun; Roger T. Howe | 1992 | Ph.D. Dissertation |
Hinged Polysilicon Structures with Integrated CMOS Thin Film Transistors | Kristofer S.J. Pister; Roger T. Howe | 1992 | Ph.D. Dissertation |
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