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Search publications by topic, publication type, advisor, author, or keywords by selecting the criteria below.
Search publications by topic, publication type, advisor, author, or keywords by selecting the criteria below.
Title | Author | Year | Publication type |
---|---|---|---|
Xenon Difluoride Etching of Silicon for MEMS | Floy I-Jung Chang; Kristofer S.J. Pister | 1995 | Master's Thesis |
Ultrasonic Microtransport | Richard M. Moroney III; Richard M. White | 1995 | Ph.D. Dissertation |
Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-Micromachined Polysilicon Microactuators | Patrick Ching-Pak Cheung; Roberto Horowitz; Roger T. Howe; Albert P. Pisano | 1995 | Ph.D. Dissertation |
The Damping Mechanism in Single-Ended Tuning Fork Resonant Structures | Gonnan K. Leung; Roger T. Howe | 1995 | Master's Thesis |
A Micro-Electro-Mechanical Systems (MEMS) Device to Measure the Fracture Strain of Polycrystalline Silicon | Peter Truxtun Jones; Roger T. Howe | 1995 | Master's Thesis |
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