Publications

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Title Author Year Publication type
Permeable Polysilicon Etch-Access Windows for Microshell Fabrication Kyle Lebouitz 1996 Master's Thesis
HexSil Micro Disk Drive Arm Roel Dieron; Albert P. Pisano; Roberto Horowitz 1996 Master's Thesis
An Investigation of MEMS Anchor Design for Optimal Stiffness and Damping Daniel Sherman; Albert P. Pisano; George C. Johnson; Panayiotis Papadopoulos 1996 Master's Thesis
Development of a Free-Space Optical Switch for Fiber Communications Based on Actuated, Silicon Surface-Micromachined Mirrors Alois Friedberger; Richard S. Muller 1996 Master's Thesis
A Micromachined Vibrating Ring Gyroscope Michael William Putty; Khalil Najafi; Kensall D. Wise; Stella W. Pang; Noel Perkins 1995 Ph.D. Dissertation

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