RTH44: Self-Healing RF MEMS Switch

The objective of this project is to create an RF MEMS switch with the capability of self-healing in order to perform hot switching of large currents. Traditional electrostatic actuation is used for closing the switch. Liquid Gallium is used for making contact thus alleviating the problem of thermal and mechanical deformation due to hot switching. The liquid droplets are confined to a distinctive pattern by exploiting the different wetting affinities that gallium has to different materials. Thermally vaporized gallium is reclaimed during the closing of the switch. The benefits derived from such a design are longer lifetime and higher current handling capacity.

Project end date: 08/31/05