Abstract:
Electrostatic MEMS resonators show great promise for RF front end applications. Their high motional resistance, however, is one of the major problems for their widespread applications. In this project, we aim to reduce such resistance by using high K dielectric instead of air gaps for transduction. Prototype devices are now being fabricated and will be characterize to see the improvements in performance.
Project end date: 01/24/07
Publication date:
August 23, 2006
Publication type:
BSAC Project Materials (Final/Archive)
Citation:
PREPUBLICATION DATA - ©University of California 2006