LWL13: High Frequency MEMS Resonator for Wireless Communication Applications


To develop and characterize a high frequency MEMS resonator for wireless communication application with CMOS compatibility. The resonator can tune or adjust its resonant frequency.

Project end date: 01/24/04

Ki Bang Lee
Publication date: 
August 19, 2003
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2003

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