Abstract:
Local on-chip pressure sensing is an important application of micro-electro-mechanical devices. Traditionaly, sensing has been done based on either piezoelectric material properties or capacitance measurements across a micromachined cavity.
Project end date: 08/18/04
Publication date:
February 9, 2004
Publication type:
BSAC Project Materials (Final/Archive)
Citation:
PREPUBLICATION DATA - ©University of California 2004