LPL20: A new pressure tranduction mechanism using elastomer micromolding


Local on-chip pressure sensing is an important application of micro-electro-mechanical devices. Traditionaly, sensing has been done based on either piezoelectric material properties or capacitance measurements across a micromachined cavity.

Project end date: 08/18/04

Cristian Ionescu-Zanetti
Publication date: 
February 9, 2004
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2004

*Only registered BSAC Industrial Members may view project materials & publications. Click here to request member-only access.