LPL13: Vertically-Integrated Micro Confocal Imaging Array (VIµ-CIA)

The goal of this project is development of MEMS laser scanning confocal microscopes for multiplexed Lab-On-A-Chip applications. The hybrid integration of microfabricated microlens scanner and confocal pinhole, laser diodes, and photodiode allows to create handheld sized autonomous confocal excitation and detection microsystem. Without use of bulky external microscopes, we have successfully demonstrated laser induced fluorescent excitation and detection from multiple of microfluidic channels and reflectance image reconstruction using the developed system.

Project end date: 02/12/04