Hollow Disk Electromechanical Coupling Cx/Co Boosting


The growing need for high performance but low power microelectromechanical system (MEMS) devices capable of operating at various frequency regimes, including high frequency (HF), very high frequency (VHF) and ultra-high frequency (UHF), fuels an increasing demand for resonators with simultaneous high quality factor (Q) and high electromechanical coupling, as gauged by the motional-to-static capacitive ratio (Cx/Co). Capacitive-gap transduced resonators have already posted some of the highest disk Cx/Co-Q products to date at HF and low-VHF. Attaining similar performance at the high-VHF and UHF ranges, however, if more difficult, as it requires electrode-to-resonator gaps considerably smaller than previously demonstrated.

This thesis explores a method that raises Cx/Co without excessive gap scaling by hollowing out a disk resonator structure, which reduces the dynamic mass and stiffness of the structure. Since Cx/Co goes as the reciprocal of mass and stiffness, a hollow disk can have considerably stronger electromechanical coupling than a solid one at the same frequency. This work introduces two types of hollow disks: asymmetric and symmetric.  

Publication date: 
May 11, 2018
Publication type: 
Master's Thesis
%0 Thesis %A Li, Yafei %A Nguyen, Clark %T Hollow Disk Electromechanical Coupling Cx/Co Boosting %I EECS Department, University of California, Berkeley %D 2018 %8 May 11 %@ UCB/EECS-2018-60 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/2018/EECS-2018-60.html %F Li:EECS-2018-60

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