High-Q Strong Coupling Capacitive-Gap Transduced RF Micromechanical Resonators

This dissertation presents a hierarchical, intuitive, and technology agnostic procedure for designing RF channel-select filters, followed by an actual demonstration solidly confirming the validity of the design method. Two distinct methods then follow that aim to increasthe resonator electromechanical coupling coefficient, which substantially improvethe functionality of the demonstrated filter for future applications, e.g., ones that require higher-order with sharper roll-off characteristics and less passband ripple. To increase functionality even further, the remaining chapters of this thesis introduce a fabrication and post-processing method using CMOS-compatible ruthenium metal that allows integration of micromechanical devicessuch as the aforementioned RF filteratop CMOS.
Publication date: 
January 31, 2020
Publication type: 
Ph.D. Dissertation
Ozgurluk, A. (2020). High-Q Strong Coupling Capacitive-Gap Transduced RF Micromechanical Resonators. United States: University of California, Berkeley.

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