This dissertation presents a hierarchical, intuitive, and technology agnostic procedure for designing RF channel-select filters, followed by an actual demonstration solidly confirming the validity of the design method. Two distinct methods then follow that aim to increase the resonator electromechanical coupling coefficient, which substantially improves the functionality of the demonstrated filter for future applications, e.g., ones that require higher-order with sharper roll-off characteristics and less passband ripple. To increase functionality even further, the remaining chapters of this thesis introduce a fabrication and post-processing method using CMOS-compatible ruthenium metal that allows integration of micromechanical devices, such as the aforementioned RF filters atop CMOS.
January 31, 2020
Ozgurluk, A. (2020). High-Q Strong Coupling Capacitive-Gap Transduced RF Micromechanical Resonators. United States: University of California, Berkeley.