BPNX1025: Intelligent Sensors for Semiconductor Metrology (New Project)

Spectroscopy-based semiconductor metrology is crucial for process development and quality control in IC manufacturing. The current metrology technologies process raw spectral data with software postprocessing, causing additional latency, power consumption, and computer memory budget. This project exploits the machine learning algorithms to train novel intelligent sensors that can both detect and compute, instantaneously giving the desired, ultimate analysis results such as thin film material and thickness.

Project is currently funded by: Federal