BPN641: InAs XOI Gas Sensor


The objective of InAs XOI gas sensor project is twofold. First, the role of size effect on sensor performance will be systematically investigated. Our XOI device structure provides a unique platform to perform this study since we can precisely control material thicknesses and transfer them on a SiO2/Si substrate. Based on this study, we will determine physical role of size effect on sensor performance. This result will be also essential to determine an optimum NR thickness for gas sensors. Secondly, we will implement multiple gas detection sensor modules on a single chip by heterogeneously functionalizing InAs NRs. Here, the InAs NR will be employed as a platform to realize such a system.

Project end date: 02/07/12

Publication date: 
August 19, 2011
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2011

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