On-chip inductors are key passive elements to high-power and radio frequency (RF) integrated circuits (ICs). This project aims to realize super-compact on-chip micro-inductor with magnetic media for high-power and RF IC's, including: 1) to explore low-loss, high resonance frequency magnetic material for inductor application; 2) to develop magnetic-material integration process; 3) to realize the super-compact magnetic-embedded inductor. The long-term objectives for this project are to resolve the current problem of lacking compact-size high-performance on-chip inductors, and then reduces the whole circuit cost significantly and helps the practical realization of RF systems-on-a- chip (SoCs) for real-world applications.
Project end date: 08/24/15