BPN386: CMOS-Integrated Nanowire-Based Molecular and Gas Sensors


This project first aims to develop a process flow to integrate silicon nanowires onto a CMOS substrate, both via and top-down and bottom-up processes. Then, by carefully designing the underlying circuitry and functionalizing the nanowire transducers, we hope to demonstrate a fully functional integrated sensing platform for various molecular agents and/or gases. The overall goal and application is to create an easy-to-use CMOS-based sensing system for low-cost portable applications.

Project end date: 02/04/10

Publication date: 
February 4, 2010
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2010

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