Employing the Electrochemical Double Layers (EDL) phenomenon and porous electrode materials, the supercapacitor have an astonishing high specific capacitance, typically on the order of thousands of times greater than common capacitors. In this project, thanks to MEMS technology, we have for the first time brought the supercapacitor concept into micro scale. Different from its sandwich-like macro scale configuration, a novel planar structure has been proposed and implemented. This device has the wide potential applications such as micro power sources and circuitry components with extermely large capacitance.
Project end date: 08/18/11