Richard S. Muller is a professor emeritus in the Department of Electrical Engineering at the University of California, Berkeley and Co-Founding Director of the Berkeley Sensor & Actuator Center. He joined the faculty at the University of California, Berkeley in 1962 where his research focus was on the physics of integrated circuit devices.
Together with Dr. T.I. Kamins of Hewlett-Packard Company, Professor Muller published Device Electronics for Integrated Circuits in 1977. In the late 1970s he began research in the area now known as MEMS, and with R.M. White founded the Berkeley Sensor & Actuator Center in 1986.
He successfully proposed that IEEE establish a New Journal in MEMS (1991). A member of the US National Academy of Engineering and an IEEE Life Fellow, he received the career MEMS Award at TRANSDUCERS ’97, as well as the IEEE Brunetti Award (1998 with R.T. Howe), a Fulbright Professorship, and a von Humboldt Research Award at TU Berlin in 1994. Other awards include the Berkeley Citation, the IEEE Millennium Medal, and the Renaissance Award from Stevens Institute of Technology. Professor Muller served as a Trustee of Stevens Institute of Technology from 1996 to 2005. In 2013, Professor Muller was a co-recipient of the IEEE/RSE/Wolfson, James Clerk Maxwell Award with Professor Richard White.
Professor Muller earned his M.S. and Ph.D. degrees in electrical engineering and physics from the California Institute of Technology.
Integrated Circuits (INC)
MEMS Micro-Optical Systems for Process Characterization
MEMS Biomedical Applications
MEMS Systems for Adaptive Optics