RSM29: Micromirror Arrays for Adaptive Optics

This project has demonstrated piston and tip/tilt actuation of an array of 500-750 µm-radius hexagonal mirrors with fill factors exceeding 98%. The mirrors will actuate above the substrate in a piston motion over a range of greater than 5 µm for astronomy applications and over 20 µm for vision science applications. Tip/tilt rotations of about a degree are also required. The frequency response must exceed 4 kHz for astronomy and 100 Hz for vision science. Finally, a scalable interconnect will be investigated that will connect from hundreds to thousands of mirror segments.

Project end date: 07/31/03