RSM38: MEMS Integrable Temperature Sensor


Temperature sensors have wide range of application. They are needed in all fields of research ranging from chemistry and biology, to electrical engineering and mechanical engineering. As miniaturization takes steps into micro-scale, the need for obtaining thermal information becomes more prevalent. Our goal in this project aims at creating micro temperature sensor that can be integrated into the MEMS structures.

Project end date: 08/31/05

Chao-chih Hsu
Publication date: 
September 10, 2004
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2004

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