Abstract:
The first goal of this project is to demonstrate a high-yield, CMOS-compatible simple process to batch-fabricate self-aligned, high-performance torsional microscanners. The second goal is to demonstrate three different, commercially demanded applications for the fabricated torsional microscanners.
Project end date: 01/07/06
Publication date:
August 30, 2005
Publication type:
BSAC Project Materials (Final/Archive)
Citation:
PREPUBLICATION DATA - ©University of California 2005