BPN300: A Simple Process to Fabricate High-Performance Torsional Microscanners and Their Applications


The first goal of this project is to demonstrate a high-yield, CMOS-compatible simple process to batch-fabricate self-aligned, high-performance torsional microscanners. The second goal is to demonstrate three different, commercially demanded applications for the fabricated torsional microscanners.

Project end date: 01/07/06

Publication date: 
August 30, 2005
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2005

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