BPN318: SiGe Processing for the Fabrication of a Floating Electromechanical System (FLEMS) Gyroscope

The long term range of this project was to demonstrate fabrication and control of a potential integrated FLEMS (Floating Electromechanical) Gyro using SiGe MEMS Technology. The sensor system is comprised of a disk-shaped proof mass that is to be electrostatically suspended between sense and drive electrodes located above, below, and at the sides of the disk. An attractive feature of this design is that the proof mass is not structurally linked via suspension, so that mechanical losses associated with anchors are eliminated

Project end date: 08/02/06