Roger T. Howe (Advisor)

Brian Otis

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 2005

Brian Bircumshaw

Alumni
Mechanical Engineering
Professor Albert P. Pisano (Advisor)
Professor Roger T. Howe (Advisor)
Ph.D. 2005

Carrie Low

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 2006

Modularly Integrated MEMS Technology

Marie-Ange Eyoum
Tsu-Jae King
Roger T. Howe
Sanjay Govindje
2006
Process design, development and integration to fabricate reliable MEMS devices on top of VLSI-CMOS electronics without damaging the underlying circuitry have been investigated throughout this dissertation. Experimental and theoretical results that utilize two “Post-CMOS” integration approaches will be presented. The first integration approach uses SiGe MEMS technology for the “Post-CMOS” monolithic integration of the MEMS devices...

Marie-Ange Eyoum

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 2006

Silicon Carbide Thin Films via Low Pressure Chemical Vapor Deposition for Micro- and Nano-electromechanical Systems

Christopher Roper
Roya Maboudian
Roger T. Howe
David B. Graves
Albert P. Pisano
2007
Micro- and Nano-electromechanical Systems (MEMS and NEMS) consist of devices which can sense and actuate on the micrometer and nanometer scales. A number of MEMS devices have been commercialized, including accelerometers, gyroscopes, pressure sensors, and micromirror displays. The most common structural layer used in this technology is polycrystalline silicon, which is adequate for MEMS/NEMS devices operating in ambient environments; however, the use...

Donovan Lee

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 2010

RTH/JDK1: A Microfabricated Electrochemical Oxygen Generator for High-Density Cell Culture Arrays

William J. Holtz
Khoa Nguyen
2003

The goal of this project was to design, fabricate and characterize an electrochemical oxygen micro-generator suitable for use in high density miniature cell culture arrays.Arrays of miniature bioreactors were built and oxygen was supplied to them via electrochemical oxygen microgenerators.

Project end date: 08/20/03

RTH/TJK2: As-Grown SiGe Thin Film with Low Stress and Low Strain Gradient

Blake C.-Y. Lin
2003

Monolithic integration of MEMS devices with driving and controlling electronics is advantageous for improving performance and lowering cost. Polycrystalline silicon-germanium (poly-SiGe), which has mechanical and electrical properties similar to poly-Si, is a promising candidate for the structural-layer material of post-CMOS integration of MEMS because poly-SiGe can be deposited at much lower temperatures than poly-Si. While low-resistivity poly-SiGe can be easily obtained utilizing in-situ p-type (i.e. boron) doping during deposition, poly-SiGe films deposited at temperatures lower...

JSS1/RTH: Fluidic assembly of RF receiver with glass-substrate inductors & antenna

Jack Peng
2003

The goal of this project is to use fluidic self-assembly to integrate RF CMOS chiplets onto micro-machined wells in glass. Because an insulator(glass) is used as the substrate, a high Q-factor of the inductor is expected. Another advantage is the low parasitic interconnects associated with the fluidic self-assembly process.

Project end date: 08/22/03