Publications

Design and Modeling of a Dual Mass SOI-MEMS Gyroscope

Ashwin Seshia
Roger T. Howe
Kristofer S.J. Pister
1999

This report discusses the design of a dual mass silicon-on-insulator(SOI) MEMS gyroscope. The main advantage of the dual mass gyroscope is the ability to cancel out common mode acceleration. The SOI MEMS process also provides several inherent advantages including increased out-of-plane stiffness, increased mass, and increased...

Integrated Micromechanical Resonant Sensors for Inertial Measurement Systems

Ashwin Seshia
Roger T. Howe
Bernhard E. Boser
Kristofer S.J. Pister
Roberto Horowitz
2002
Thumbnail-sized inertial measurement systems based on Micro Electro Mechanical Systems (MEMS) technology have been perceived as a breakthrough in the field of inertial navigation. However, even as micromechanical accelerometers have seen widespread commercialization, vibratory micromechanical gyroscopes...

Assembly and Molding Processes for Three-Dimensional Microfabrication

Elliot Hui
Roger T. Howe
Kristofer S.J. Pister
Dorian Liepmann
2002
Lithographic semiconductor microfabrication has been employed with great success for the manufacture of mechanical structures, achieving microscopic dimensions and great complexity at low cost. However, due to the inherently planar nature of the lithographic process, this technology is limited in its capability to produce three-dimensional structures. In this work, three strategies are presented for extending thin-film microfabrication into the...

Ultrasonic Microdevices for Integrated On-Chip Biological Sample Processing

George Dougherty
Timothy Sands
Eugene Haller
Albert P. Pisano
2002
Integrated lab-on-a-chip devices, also known as micro total analysis systems (p-TAS), are expected to play a leading role in biological research and medicine in the 21st century, and on chip sample processing is a key function of...

A Magnetically Actuated Scanning Microplatform for Intravascular Ultrasound Imaging

Carl Chang
Richard S. Muller
1998

A magnetically actuated microplatform for use in invivo instrumentation applications is described. A specific embodiment for an intravascular ultrasound imaging system is the focus of this research. Magnetic microactuators with the ability to carry ultrasound transducer elements while in a liquid have been demonstrated. These actuators have also shown the ability to rotate the required angular range (+/-45) within the specified magnetic field limits (less than 150...

Ultra-Low Energy Architectures and Circuits for Cubic Millimeter Distributed Wireless Sensor Networks

Brett Warneke
Kristofer S.J. Pister
Jan M. Rabaey
Paul K. Wright
2003
This dissertation demonstrates that it is possible to build a useful and complex sensor and communication platform in the cubic millimeter scale using optimizations at the circuit, computer architecture, component, and system-levels to contribute toward this goal. The exponential size and power reductions in computation, communication, and sensing in recent years allows the integration of an autonomous wireless sensor node into volumes less than 16 mm^3. System architectures for...

Experimental Results of Miniature Rotary Internal Combustion Engines

Aaron Knobloch
Carlos Fernandez-Pello
Dorian Liepmann
2001

Internal combustion engines offer many advantages over batteries for applications in portable power generation. A liquid hydrocarbon-fueled engine could provide ten times the specific energy density of the best batteries available....

Ultra-Deep Reactive Ion Etching for Silicon Wankel Internal Combustion Engines

Aaron Knobloch
Albert P. Pisano
Carlos Fernandez-Pello
Seth Sanders
2003
A new process is presented for the development of a micro, internalcombustion engine fabricated in a process that achieves 900μm deep features via deep reactive ion etching (DRIE). A singlesided 900μm ultradeep etch process with high mask selectivity is used to generate straight sidewall structures with low sidewall roughness. This research is part of an effort to create an autonomous, portable MEMSbased...

COTS Dust

Seth Hollar
David M. Auslander
Kristofer S.J. Pister
David E. Culler
Albert P. Pisano
2000
The goal of this thesis is to provide information on cubic inch autonomous sensor devices otherwise known as Commercial-off-the-Shelf Dust (COTS Dust). COTS Dust is capable of sensing and responding to environmental changes and communicating to other devices. This thesis is the compilation of my experience and knowledge in the design of COTS Dust and can be considered a guide for those who wish to design similar systems. Ultimately, its my wish that material provided within contains enough information for ...

A Solar-Powered, Milligram Prototype Robot from a Three-Chip Process

Seth Hollar
Kristofer S.J. Pister
Albert P. Pisano
Roger T. Howe
Richard M. White
2003
Commercial CMOS electronics and two in-house processes have been combined to establish a framework for making hybridized, milligram mobile robots. To demonstratethe capabilities of this framework, an 8.6 mm long, 10 mg, solar-powered prototype robot has been built. Dragging its tail end, the robot has demonstrated autonomous movement under its own weight and power, shuffling to the side a few millimeters and lifting its...