Physical Sensors & Devices

The geometric designs of MEMS devices can profoundly impact their physical properties and eventual performances. However, it is challenging for researchers to rationally consider a large number of possible designs, as it would be very time- and resource-consuming to study all these cases using numerical simulation. In this paper, we report the use of deep learning techniques to accelerate the MEMS design cycle by quickly and accurately predicting the physical properties of numerous design candidates with vastly different geometric features. Design candidates are represented in a...

Two important advantages of MEMS switches are their ability to survive heat and radiation. In addition, there has been increasing demand for passing transistor replacement in specific reconfigurable computing and signal routing application; passing transistors used in VLSI exhibit on-state resistances of thousands of ohms or more, which causes signal delay and increased power consumption. In this project, the design, fabrication and characterization of MEMS contact switches customized for VLSI are presented, herein referred to as “VLSI MEMS switches”.

Project end...

In developing micro-robots for exploration in non-uniform terrain, it is often the case that robots fall over. This work seeks to provide a solution in the self-righting of autonomous micro-robots to overturn a 1cc, 1 gram cube microrobot with regular octahedral symmetry that has fallen on either of its four sides and overturning said microrobot once upside down. Our design currently consists of a 3-bar linkage in conjunction with an electrostatic inchworm motor. First-generation devices are in fab as of August. Hand analysis indicates that self-righting from any face should be...

We are developing robust, high force, low power, and efficient MEMS inchworm motors for microrobots. So far, we have created 3x4.7mm motors in a 40um SOI process capable of linearly actuating a shuttle with 15mN force and 5mm/s travel at < 1mW power draw to > 50mm displacement. By integrating these motors into 550um thick reinforcing silicon substrate structures we created a microgripper capable of reliably lifting 1g weights and other macroscopic objects. We also showed gripper operation off solar power in BSAC project BPN873. Finally, we have analyzed motor efficiency, an...