BPN753: Ratio-Metric Readout Technique for MEMS Gyroscopes with Force Feedback

Scale factor accuracy is critical for navigation grade gyroscopes. Traditional MEMS vibratory gyroscopes with force feedback provide good resolution, but their scale factor depends on a plethora of parameters including proof mass bias voltage, drive mode velocity,dimensions of the forcer electrodes,and mass. This project develops a ratio-metric readout technique for force feedback gyroscopes that provides a precise scale factor. Scale factor variations over 12 days are reduced from 547ppm p-p to 23ppm p-p, and temperature coefficient of the scale factor is reduced from 560ppm/C to 4ppm/C at room temperature.

Project end date: 02/03/15