BPN753: Ratio-Metric Readout Technique for MEMS Gyroscopes with Force Feedback

Abstract: 

Scale factor accuracy is critical for navigation grade gyroscopes. Traditional MEMS vibratory gyroscopes with force feedback provide good resolution, but their scale factor depends on a plethora of parameters including proof mass bias voltage, drive mode velocity,dimensions of the forcer electrodes,and mass. This project develops a ratio-metric readout technique for force feedback gyroscopes that provides a precise scale factor. Scale factor variations over 12 days are reduced from 547ppm p-p to 23ppm p-p, and temperature coefficient of the scale factor is reduced from 560ppm/C to 4ppm/C at room temperature.

Project end date: 02/03/15

Publication date: 
August 18, 2014
Publication type: 
BSAC Project Materials (Final/Archive)
Citation: 
PREPUBLICATION DATA - ©University of California 2014

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