The goal of this project is to develop a high precision MEMS ultrasonic Doppler velocity sensor utilizing an array of Aluminum Nitride transducer elements for use in personal navigation units. Aluminum Nitride has been chosen for its desirable piezoelectric properties and compatibility with CMOS processes which allows for on chip integration of MEMS and electronics. In our device we aim to produce an ultrasound source-receiver pair with integrated signal processing circuitry on a single chip. To determine the velocity we will be developing and implementing an efficient and accurate signal processing scheme to detect the Doppler shift of the backscattered ultrasound wave.
Project end date: 02/03/09