NanoPlasmonics, Microphotonics & Imaging

Research that includes:

  • Polymer, printed optical lenslet arrays
  • Microfluidic tuneable photopolymer lenses
  • Optical switches and planar lightwave MEMS
  • Vertically integrated microconfocal arrays
  • Bio-inspired integration of tuneable polymer optics with imaging electronics

MCW9: Tunable SOI Microring Optical Modulator

Sagi Mathai
Joanna Lai
Xin Sun

CMOS scaling driven by “Moore’s Law” has allowed great improvements in microelectronic integrated circuit technology. In addition, high index contrast SOI optical waveguides are receiving much attention for their potential in implementing high density photonic integrated circuits alongside microelectronics. This project entails the design, fabrication, and experimental demonstration of a tunable SOI microring optical modulator with the potential for integration with CMOS microelectronics.

Project end date: 07/24/07

RSM36: Selectively Addressed MEMS Digital-Mirror Arrays for Adaptive Optics

Blake Lin

This project investigates the design of MEMS-deformable-mirror (DM) arrays for adaptive-optics (AO) systems. In these arrays, micromirror segments are individually addressed and controlled to correct the aberrated wavefronts of an optical beam dynamically. This correction improves image resolution in telescopes or vision-science instruments. Our research focuses on developing a CMOS-compatible MEMS process to integrate micromirrors with their driving electronics and control circuitry. In this way, we will control large mirror arrays selectively.

Project end date: ...

MCW8: MEMS Endoscopic Lens-Based Optical Coherence Tomography

Ki-Hun Jeong
Jingyi Chen
Jongbaeg Kim

There is a need to develop a compact in dimension, high speed, bi-axial scanning, and robust scanner with Microelectromechanical Systems (MEMS) technology for in vivo imaging in Optical Coherence Tomography (OCT) applications. These MEMS based endoscoopes with distal beam scanning can image with higher speed, precision, and repeatability than conventional linear scanning endoscopes in which the entire endoscope is mechanically translated with respect to the observed tissue. Most importantly, with bi-axial scanning capability of the MEMS scanner, three dimensional in vivo real time...

BPN376: High frequency optoelectronic oscillator (OEO) by optical injection locking

Hyuk-Kee Sung
Erwin K. Lau

Optoelectronic oscillators (OEOs) can generate high-purity RF signals with very low phase noise. The application covers a wide area of photonic and RF systems such as microwave frequency standards, radars, RF photonics and optical signal processing. Conventional OEOs have two potential drawbacks: RF amplifiers with high gain (up to ~ 60 dB) are needed to compensate the RF link loss of the feedback loop; and high frequency operation is challenging. To overcome the drawbacks and further enhance the performance of OEO, we propose a novel optical injection-locked optoelectronic...

BPN390: Fluid microlens for MEMS

George Chao-chih Hsu

Tunable micro-lenses have been the focus of many studies recently. However, due to the inert complexity of the fluid-solid interaction, arraying has yet to be achieved. This project focuses on creating an efficient fabrication process with new design and materials. These improvements make the new design readily applicable to collimators and Shack-Harmon Sensors. Furthermore, we will study performance of various lens liquids, more specifically ones that will increase the working temperature range. We will then characterize the new lens liquids and hydrophobic layer under various...

BPN349: MEMS Tunable Micro-optical Resonator

Ming-Chun (Jason) Tien

Microring and microdisk resonators are key components to realize silicon monolithic optoelectronic devices because they have the potential of integration with current CMOS electronic devices. The applications include most wavelength-division-multiplexing photonic circuits, such as optoelectronic transceivers, wavelength filters, add-drop multiplexers, optical delay lines, and group velocity dispersion compensators. Furthermore, in order to achieve dynamic switching functions, tunable capability is desired. Here we propose a tunable microring resonator with integrated MEMS actuators,...

DAH2: A MEMS Optical Modulator and Filter

Jack L. Skinner

Optical sensors have applications in chemical detection, thermal imaging, motion sensing, and temperature measurement. A narrow-band optical filter is often used to confine radiation intensity measurement to a specific range of optical wavelengths. Similarly, devices such as optical displays require precise filtration and modulation of light. The current project seeks to create a microelectromechanical system (MEMS) device with narrow-band optical filtering and modulation properties. This research will result in technology to decrease sensor size and improve sensor functionality,...

LWL26: Nano Photodetectors

Lei Luo

Development of UV sensors using nanowires of wide-gap materials for applications in nano-optics and chemical-detection.

Project end date: 01/29/08

BPN332: Monolithic micromirror array for single-chip MEMS-based dense wavelength division multiplexed (DWDM) crossconnect

Chenlu Hou

The new goal of this project is to develop a micromirror array, which can be integrated into monolithic 1xN wavelength-selective switch (WSS) and NxN wavelength-selective cross connect (WSXC) for dense wavelength division multiplexed (DWDM) network. The 0.8nm channel spacing of DWDM network requires a forty- element micromirror array with a pitch of 75�m for independent spatial switching of incoming wavelength channels among output waveguides. For integration into a 1x4 WSS and 4x4 WSXC, the micromirror requires a maximum mechanical scan angle of 9.2�.

Project end...

BPN308: Plastically Self-Aligned Micromirrors

SangHoon Lee
Chieh Chang

This project aims to use the plastic deformation of single-crystal-silicon as the key process to make Angular Vertical Comb-drive (AVC) torsional microactuators using a simple three-mask process on silicon-on-insulator wafer and yet providing versatility for the potential applications in Optical MEMS (switches, bi-directional free-space laser communications), RF MEMS (variable capacitor), Image/display (head mount display) and the others.

Project end date: 07/30/08