RSM36: Selectively Addressed MEMS Digital-Mirror Arrays for Adaptive Optics


This project investigates the design of MEMS-deformable-mirror (DM) arrays for adaptive-optics (AO) systems. In these arrays, micromirror segments are individually addressed and controlled to correct the aberrated wavefronts of an optical beam dynamically. This correction improves image resolution in telescopes or vision-science instruments. Our research focuses on developing a CMOS-compatible MEMS process to integrate micromirrors with their driving electronics and control circuitry. In this way, we will control large mirror arrays selectively.

Project end date: 07/27/07

Publication date: 
February 2, 2007
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2007

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