Liwei Lin (Advisor)

Research Advised by Professor Liwei Lin

Lin Group:  List of Projects | List of Researchers

Curved and Bimorph Piezoelectric Micromachined Ultrasonic Transducers (PMUT)

Sina Akhbari
Liwei Lin
George C. Johnson
Tsu-Jae King Liu
2016

Ultrasonic transducers have been realized as nondestructive tools for a variety of applications, such as medical imaging, diagnosis, therapy, nondestructive testing, range finding, and gesture recognitions. Ultrasonic transducers fabricated by MEMS (Microelectromechanical Systems) technologies are known to have distinct advantages over conventional ultrasound devices in terms of device resolution, bandwidth, power consumption, and cost. This work focuses on innovative architectures of Piezoelectric Micromachined Ultrasonic Transducers (pMUT) for improved electro-mechano-acoustical...

APP54: MEMS Strain Gauge on Steel: Testing Localized Silicon-Steel Bonds

Theodore Prescop
2003

A rapid bonding process for installing vacuum sealed MEMS strain sensor modules to mechanical components is being developed. This innovative process will be developed to replace conventional adhesive-based approaches. In particular, the silicon to steel bond must achieve these stringent requirements: long life, resistance to chemicals, short bonding process time, and a wide range of storage temperatures. To ensure that the strain within a steel substrate will be accurately measured by the MEMS strain gauge, properties of the bond layer between silicon and steel are observed and...

LWL4: MEMS Sensor for Hard Disk Glide Test

Jongbaeg Kim
2003

Characterization of pitch and roll motions of the slider in the hard disk gimbal system are important parameters in order to achieve higher aerial recording densities. This project describes a novel piezoresistive-type microsensor that could be directly mounted on the existing slider/gimbal system of a hard disk drive to simultaneously measure the pitch and roll angles of the slider.

Project end date: 07/31/03

LWL19: Nickel Nanocomposite Film for MEMS Applications

Kwok-Siong Teh
2003

The ultimate goal is to develop CMOS-compatible, low cost nickel-nanocomposite materials to complement polysilicon for use as MEMS structural material.

Project end date: 01/24/04

LWL22: Nanostructure-Based Nanoactuator

Maggie Chau
2003

This project aims to develop nanoactautors based on the actuation of nanostructures such as nanowires and/or nanotubes. With the emerging technology of producing silicon nanowires and carbon nanotubes (CNTs), designing an actuation application would be the next advancement of nanotechnology. This nano actuator will be fabricated by the in-house produced silicon nanowires/carbon nanotubes. Additional processing steps and actuation means will be required to manifest the nanostructures for actuation demonstrations. We intend to investigate related design, process and material issues to...

LWL12: Disposable Microbatteries and Microvehicles for MEMS

Ki Bang Lee
Firas Sammoura
2003

This research aims to develop microbatteries and microvehicles that can be integrated with disposable MEMS or bioMEMS devices as power sources and transport microdevices from one place to other place. As such, the fabrication processes of the microbatteries and microvehicles are to be compatible with common MEMS fabrication processes and IC manufacturing processes, such as the CMOS process.

Project end date: 01/24/04

LWL7: Water-Powered Microfluidic Devices for Diagnostic and Drug Delivery Systems

Yu-Chuan Su
Lei Luo
2003

The main goal of this project is the development of water-powered microfluidic devices for diagnostic and drug delivery applications. Osmosis, capillarity, microfabrication, and polymer processing techniques are employed to design and fabricate microfluidic devices, including channels, actuators, valves, pumps, and flow discretizers. Because of the significant reduction on electricity consumption, water-powered microfluidic devices provide attractive alternatives for the realization of lower-power diagnostic and implantable drug delivery systems.

Project end date:...

LWL13: High Frequency MEMS Resonator for Wireless Communication Applications

Ki Bang Lee
2003

To develop and characterize a high frequency MEMS resonator for wireless communication application with CMOS compatibility. The resonator can tune or adjust its resonant frequency.

Project end date: 01/24/04

LWL23: Vertically Supported Microactuators

Ki Bang Lee
2003

This research aims to develop vertically supported microactuators and optical systems on a chip for MEMS and MOEMS applications that require motions of surface-micromachined microstructures or microoptical components. The fabrication process of microactuators is compatable with common MEMS fabrication process and IC manufacturing process, such as the CMOS process.

Project end date: 01/24/04

LWL10: An Integrated Polypyrrole/Carbon Nanotube (PPy/MWNT) Nanocomposite Glucose Sensor

Kwok-Siong Teh
2004

The ultimate goal is to develop an enzymatic and mediatorless glucose sensor, which can be integrated with micro-osmotic pumps, micro-valves, micro-accumulators and microneedles, to form a continuous-flow bioassay system.

Project end date: 08/18/04