LWL12: Disposable Microbatteries and Microvehicles for MEMS


This research aims to develop microbatteries and microvehicles that can be integrated with disposable MEMS or bioMEMS devices as power sources and transport microdevices from one place to other place. As such, the fabrication processes of the microbatteries and microvehicles are to be compatible with common MEMS fabrication processes and IC manufacturing processes, such as the CMOS process.

Project end date: 01/24/04

Ki Bang Lee
Publication date: 
August 20, 2003
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2003

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