Bernhard Boser (Advisor)

Scale factor accuracy is critical for navigation grade gyroscopes. Traditional MEMS vibratory gyroscopes with force feedback provide good resolution, but their scale factor depends on a plethora of parameters including proof mass bias voltage, drive mode velocity,dimensions of the forcer electrodes,and mass. This project develops a ratio-metric readout technique for force feedback gyroscopes that provides a precise scale factor. Scale factor variations over 12 days are reduced from 547ppm p-p to 23ppm p-p, and temperature coefficient of the scale factor is reduced from 560ppm/C to...

An ultrasonic rangefinder has a working range of 30 mm to 450 mm and operates at a 375 Hz maximum sampling rate. The random noise increases with distance and equals 1.3 mm at the maximum range. The range measurement principle is based on pulse-echo time-of-flight measurement using a single transducer for transmit and receive. The transducer consists of a piezoelectric AlN membrane with 400 µm diameter, which was fabricated using a low-temperature process compatible with processed CMOS wafers. The performance of the system exceeds the performance of other micromechanical rangefinders.

The timely and accurate diagnosis of infectious diseases is indispensable for directing patient management and informing larger public health decisions. For the individual patient, delays in accurate diagnosis may delay necessary treatment and consequently result in a negative outcome. From the public health standpoint, prompt awareness of disease outbreaks is critical for an effective response. In developed countries, both the medical infrastructure and...