In-Air Rangefinding with an AlN Piezoelectric Micromachined Ultrasound Transducer


An ultrasonic rangefinder has a working range of 30 mm to 450 mm and operates at a 375 Hz maximum sampling rate. The random noise increases with distance and equals 1.3 mm at the maximum range. The range measurement principle is based on pulse-echo time-of-flight measurement using a single transducer for transmit and receive. The transducer consists of a piezoelectric AlN membrane with 400 µm diameter, which was fabricated using a low-temperature process compatible with processed CMOS wafers. The performance of the system exceeds the performance of other micromechanical rangefinders. 

Publication date: 
May 23, 2011
Publication type: 
Journal Article
Przybyla, R. J., Shelton, S. E., Guedes, A., Izyumin, I. I., Kline, M. H., Horsley, D. A., & Boser, B. E. (2011). In-air rangefinding with an AlN piezoelectric micromachined ultrasound transducer. IEEE Sensors Journal, 11(11), 2690-2697.