Ali Javey (Advisor)

One of the major challenges towards scaling down of the electronic devices to the nm-regime is attaining controlled doping of semiconductor materials with atomic accuracy. At such small scales, the various existing technologies suffer from a number of setbacks, including an inability to achieve junction abruptness down to nm range, stochastic distribution of the dopant atoms, crystal damage, and incompatibility with nanomaterials. In this work, We report the formation of sub-5 nm ultrashallow junctions in 4” Si wafers enabled by the molecular monolayer doping of phosphorous and...

This project first aims to develop a process flow to integrate silicon nanowires onto a CMOS substrate, both via and top-down and bottom-up processes. Then, by carefully designing the underlying circuitry and functionalizing the nanowire transducers, we hope to demonstrate a fully functional integrated sensing platform for various molecular agents and/or gases. The overall goal and application is to create an easy-to-use CMOS-based sensing system for low-cost portable applications.

Project end date: 02/04/10

Electrical connectors based on hybrid core-multishell nanowire forests that require low engagement forces are demonstrated. The physical binding and electrical connectivity of the nanowire electrical connectors arise from the van der Waals interactions between the conductive metallic shells of the engaged nanowire forests. Specifically, the nanofibrillar structure of the connectors causes an amplification of the contact area between the interpenetrating nanowire arrays, resulting in strong adhesion with relatively low interfacial resistance. The nanowire electrical connectors may...