Albert P. Pisano (Advisor)

BPN365: MEMS Metal Gimbal: Design and Fabrication

Chris McCoy
2007

The UC Berkeley MicroGimbal research project strives to parametrically optimize a 2DOF, torsional comb drive actuated gimbal platform that will support and position mm-scale imaging devices. Design parameters to be optimized in this feasibility study include but are not limited to: bandwidth, resonant frequency, payload capability, system mass, and degree of rotation. This two-student research team ultimately seeks to attain performance measures of low power consumption (P < 2W), large gimbal deflection (θ = +/- 30 deg.), high z-stiffness, high bandwidth, and high resonant...

BPN370: MEMS Metal Gimbal: Design and FEM

Ya-Mei Chen
2007

The long range goal of this research is to analyze the a UC Berkeley designed MircoGimbal with a finite element method (FEM) simulator, ANSYS, to achieve design optimization. A fundamental design goal of the MicroGimbal is to maximize the rotation angle (current target is +/- 30 degrees) while minimizing the stress. TheorticallyTheoretically, it can be obtained by having cross section with low moment of inertia and long length . However, low moment of inertia and long length reduce the beams ability to support the payload in z-direction. Due to these competing phenomena, optimization...

APP93: MEMS Biopolymer: RF-Interrogated Biosensor (MIB): Sensor Design

Sebastien Payen
2007

An interdisciplinary research program bridging the domains of biochemistry, radiofrequency I.D. tags, telecommunications, and intelligent network interface is outlined. In this proposal is described a MEMS RF-Interrogated Biosensor (MIB). The MIB is a microfabricated structure that can communicate biometric data to a reader a few feet away. The use of a passive device enables to build a cheap, powerless and wireless biosensor.

Project end date: 01/28/08

BPN303: MEMS Biopolymer: Polymer Coated Cantilevers for Infrared Heat Sensing

Michael T. Mueller
2007

The goal of this research is to use biomimetics to develop an uncooled, photomechanic infrared sensor formed from a cantilever bimorph. One side of the bimorph uses chitin (or potentially other polymers) in order to achieve a high thermal mismatch and maximize deflection. The objective is to maximize deflection for a given amount of incidient infrared radiation. Our design is inspired by the jewel beetle Melanophila acuminata, which has an IR-sensitive pit organ for the remote detection of forest fires, an evolutionary advantage that allows it to lay eggs in an area free of predators...

BPN416: AlN Piezo: Aluminum Nitride RF Filters

Jan Kuypers
2008

The goal of this project is to use piezoelectric Aluminum nitride (AlN) MEMS resonators to develop RF bandpass filters which can achieve multiple frequency operation with CMOS compatibility and high quality factor. These highly-integrated bandpass filter arrays with low power dissipation and small form factor will enable next-generation wireless communication systems.

Project end date: 02/07/08

BPN373: AlN Piezo: Aluminum Nitride CMOS-Integrated Accelerometer (MiNaSIP)

Andrew Cardes
2008

The purpose of this project is to investigate the use of Aluminum-Nitride (AlN) thin films in accelerometer design. Aluminum Nitride is attractive in this regard as the piezoelectric properties of AlN remove the need for electrostatic comb structures for position sensing and the deposition of AlN is viable material for post-CMOS MEMS fabrication. The long-term objective of this project is to realize self-temperature compensating resonators through choice of electrode, sacrificial, and substrate materials; and to quantify energy dissipation caused by thermo piezo elastic dissipation...

APP79: MEMS Biopolymer: Micro Plastic Injection Molded Fluidic Chip with Thermally Actuated Hydrogel Valves

Emil J. Geiger
2008

The goal of this project is to develop a polymer microfluidic system to test system level performance. The chip will be plastic injection molded with integrated fluidic interconnects. Polymer film with patterned metal traces will be used to enclose the channel. The traces will allow simple control elements such as heaters and electrodes to be integrated into the chip. Previous work at UC Berkeley has developed a thermal sensitive hydrogel valve that can be lithographically patterned. This valve will be incorporated into the chip and actuated via on-chip heaters. A test assay will be...

BPN368: AlN Piezo: Aluminum Nitride Wideband RF Filters

Yun-Ju (Matilda) Lai
2008

The goal of this project is to use piezoelectric Aluminum Nitride (AlN) MEMS contour mode resonators to develop RF bandpass filters which can achieve multi-frequency per chip, CMOS compatibility and high quality factor Q. The highly-integrated bandpass filter arrays with low power dissipation and small form factor, will be promising technology to accomplish next-generation wireless communication systems.

Project end date: 07/30/08

BPN425: Aluminum Nitride-Based Actuators for Tunable Terahertz Electronics

Mona Jarrahi
2009

Fast growing applications of terahertz frequency in different areas such as material spectroscopy, medical imaging, radar systems, and security makes highly efficient, compact terahertz electronics highly on demand. However, the electromagnetic spectrum range at the corresponding frequencies (between 0.1 and 10 THz) has not been completely explored, due to the limitations of traditional microwave technology at long wavelengths and optical/laser sources at shorter wavelengths.

Project end date: 07/30/08

APP90: MEMS Electro-magnetic Valve-Process Development

Eri Takahashi
2008

The objective of this research is to develop a valve with an actuator for fuel delivery system for a 1500mm3 Wankel engine that operates from 5000 to 35000 RPM. The engine is designed to operate with multi-fuel, such as Kerosene, Methanol, Gasoline and Diesel. This will require flow control over the mass flow rate range of 5 to 20 mg/sec. Integration into a Silicon engine end plate is desired for one particular engine application, but the project will deliver a series of prototypes that will be used for testing in other engine applications.

Project end date: 07/30...