BPN416: AlN Piezo: Aluminum Nitride RF Filters


The goal of this project is to use piezoelectric Aluminum nitride (AlN) MEMS resonators to develop RF bandpass filters which can achieve multiple frequency operation with CMOS compatibility and high quality factor. These highly-integrated bandpass filter arrays with low power dissipation and small form factor will enable next-generation wireless communication systems.

Project end date: 02/07/08

Publication date: 
January 25, 2008
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2008

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