Abstract:
The goal of this project is to use piezoelectric Aluminum Nitride (AlN) MEMS contour mode resonators to develop RF bandpass filters which can achieve multi-frequency per chip, CMOS compatibility and high quality factor Q. The highly-integrated bandpass filter arrays with low power dissipation and small form factor, will be promising technology to accomplish next-generation wireless communication systems.
Project end date: 07/30/08
Publication date:
February 7, 2008
Publication type:
BSAC Project Materials (Final/Archive)
Citation:
PREPUBLICATION DATA - ©University of California 2008