BPN368: AlN Piezo: Aluminum Nitride Wideband RF Filters


The goal of this project is to use piezoelectric Aluminum Nitride (AlN) MEMS contour mode resonators to develop RF bandpass filters which can achieve multi-frequency per chip, CMOS compatibility and high quality factor Q. The highly-integrated bandpass filter arrays with low power dissipation and small form factor, will be promising technology to accomplish next-generation wireless communication systems.

Project end date: 07/30/08

Yun-Ju (Matilda) Lai
Publication date: 
February 7, 2008
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2008

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