BPN365: MEMS Metal Gimbal: Design and Fabrication

The UC Berkeley MicroGimbal research project strives to parametrically optimize a 2DOF, torsional comb drive actuated gimbal platform that will support and position mm-scale imaging devices. Design parameters to be optimized in this feasibility study include but are not limited to: bandwidth, resonant frequency, payload capability, system mass, and degree of rotation. This two-student research team ultimately seeks to attain performance measures of low power consumption (P < 2W), large gimbal deflection (θ = +/- 30 deg.), high z-stiffness, high bandwidth, and high resonant frequency (f >1kHz). This device has been designed to be manufactured within the design rules of the 3D, multi-layer, PolyStrata process.

Project end date: 01/25/08