Ming C. Wu (Advisor)

Research Advised by Professor Ming C. Wu

Sirui Tang

Graduate Student Researcher
Electrical Engineering and Computer Sciences
Professor Ming C. Wu (Advisor)
Ph.D. 2028 (Anticipated)

BPNX1010: Foundry-Compatible Silicon Photonic MEMS Switch

Arkadev Roy
Daniel Klawson
Yiyang Zhi
Sirui Tang
Erik Anderson
2025

Integrated silicon photonic switches can serve as primary building blocks for low-latency, high-bandwidth interconnects for communication in data-intensive scenarios ranging from servers in datacenters to chiplets in multi-chip integrated packages. Our group has been developing MEMS-based large-scale silicon photonic switches which are particularly attractive for their low-loss, high-extinction, and low-power performance as well as sub-microsecond switching speed. Previous demonstrations, although fully compatible with CMOS foundries, relied upon a custom fabrication stack. The goal of the...

BPNX1012: All-Dielectric Integrated Microlens Couplers for Wafer-Scale Packaging

Sirui Tang
Jianheng Luo
Johannes Henriksson
2025

Despite the widespread use of silicon photonics, fiber coupling remains a major challenge in mass production. Our group has demonstrated integrated microlens couplers (IMCs) as an efficient, broadband, and polarization-insensitive solution for wafer-scale fiber-to-chip coupling, with a previously achieved free-space loss of 0.6 dB.

In this project, we are transitioning from polymer-based to hard-material IMCs, fabricating microlens using SiON and utilizing anisotropic etching to transfer the lens pattern from PR to SiON. By optimizing the oxide-to-nitride ratio, we minimized
...

BPN961: Integrated Photonics for Scalable Trapped Ion Quantum Computing

Daniel Klawson
Yiyang Zhi
Arkadev Roy
Rohan Kumar
2025

Photonic integrated circuits (PICs) play a pivotal role in scaling trapped ion quantum systems. However, current quantum PICs suffer from low ion densities. We present a novel quantum PIC for individual optical control of closely-spaced trapped ion qubits. Our device achieves effectively achromatic beam focusing from 405 nm to 810 nm (and beyond) via a planar waveguide lens and a 3D-printed biconic mirror. Moreover, we have measured 30 dB crosstalk at a 5 µm pitch for the 532 nm and 729 nm barium and calcium gate wavelengths, surpassing the state-of-the-art. Finally, our monolithic surface...

BPNX1052: Piezoelectric MEMS Programmable Photonic Integrated Circuits (New Project)

Huicong Deng
Arkadev Roy
Sirui Tang
Daniel Klawson
Yiyang Zhi
Liwei Lin
2025

Integrated silicon photonic switches are extensively used in modern compute infrastructure, serving as fundamental building blocks for high-speed data communication and computing in large-scale data centers. Our group has previously developed MEMS-based photonic switches that achieve large-scale integration, high bandwidth, and low optical loss. However, their operation is limited by the high driving voltages inherent to electrostatic MEMS actuation.

In this project, we aim to develop piezoelectric MEMS-based programmable integrated circuits for optical signal routing and on-chip...

Huicong Deng

Graduate Student Researcher
Mechanical Engineering
Professor Liwei Lin (Advisor)
Professor Ming C. Wu (Advisor)
Ph.D. 2029 (Anticipated)

Huicong Deng received his B.E. in Electrical Engineering from University of Chinese Academy of Sciences in 2024. He is currently pursuing a Ph.D. degree in Mechanical Engineering, co-advised by Prof. Liwei Lin and Prof. Ming C. Wu. His research interest includes MEMS, integrated photonics and PMUTs.

Arkadev Roy

Postdoctoral Researcher
Electrical Engineering and Computer Sciences
Professor Ming C. Wu (Advisor)

Arkadev Roy obtained his Ph.D. Degree in electrical engineering from California Institute of Technology in 2023. He completed his BTech degree in Electronic and Electrical communication engineering from the Indian Institute of Technology Kharagpur in 2018. Currently, he is a postdoc scholar at UC Berkeley and his work focuses on opto-electro-mechanical systems and heterogeneous integration.

BSAC Spring 2024 Research Review Presenter

...

Johannes Henriksson

Graduate Student Researcher
Electrical Engineering and Computer Sciences
Professor Ming C. Wu (Advisor)
Ph.D. 2025

Johannes graduated from Lund University, Sweden, with a Masters degree in Engineering Physics which also included one year at UCLA as an exchange student. He has work experience from BorgWarner, ON Semiconductor and Lawrence Livermore National Laboratory and Apple. Johannes is currently pursuing his PhD degree in Electrical Engineering and Computer Science at UC Berkeley where he is working with Prof. Ming Wu on MEMS and silicon photonics.

Kyungmok Kwon

Alumni
Electrical Engineering and Computer Sciences
Professor Ming C. Wu (Advisor)
PostDoc 2021

Dr. Kyungmok Kwon graduated from KAIST, Korea, with a Ph.D degree in Electrical Engineering. His research area is silicon-photonics, nanophotonics, nanoengineering and nanomaterial. Kyungmok is currently a postdoctoral researcher in Electrical Engineering and Computer Science at UC Berkeley where he is working with Prof. Ming Wu on MEMS and silicon photonics.