Integrated silicon photonic switches are widely used in modern computing infrastructure, serving as fundamental building blocks for high-speed data communication in large-scale data centers. Our group has previously developed MEMS-based photonic switches that achieve large-scale integration and high bandwidth. However, their fabrication process is not fully compatible with standard foundry processes, and silicon itself imposes intrinsic limits on optical loss and operating wavelength range.
In this project, we develop all-dielectric MEMS optical circuit switches based on silicon nitride, a foundry-compatible material platform. By employing electrothermal actuation without any customized fabrication steps, we aim to achieve CMOS-compatible driving voltages while enabling ultra-low optical loss and operation across both telecom and visible wavelengths.
Project currently funded by: Federal