BPNX1078: Silicon Photonic Optical Circuit Switches with Surface-Micromachined MEMS Actuators (New Project)

We present a silicon photonic optical circuit switch (OCS) based on surface-micromachined MEMS actuators integrated with silicon photonic waveguides. The multilayer architecture separates the MEMS actuator layer from the optical layer, allowing mechanical structures and electrical interconnects to cross over optical waveguides without interference. This architecture enables more compact and fully addressable switching, while providing greater design flexibility and improved mechanical robustness through high-aspect-ratio springs and electrostatic actuators.

Project currently funded by:  Federal