|
Design, Fabrication, and Optimization of Micromechanical Flexures |
Young-Ho Cho; Albert P. Pisano; Roger T. Howe |
1990 |
Ph.D. Dissertation |
|
Integrated Microphone with CMOS Circuits on a Single Chip |
Eun Sok Kim; Richard S. Muller |
1990 |
Ph.D. Dissertation |
|
Electrostatic Comb Drive for Resonant Sensor and Actuator Applications |
William C.-K. Tang; Roger T. Howe |
1990 |
Master's Thesis |
|
Polysilicon Microstructures to Characterize State Friction |
Martin Lim; Roger T. Howe; Roberto Horowitz |
1990 |
Master's Thesis |
|
Integrated Micromachinery -- Moving Structures on Silicon Chips |
Long-Sheng Fan; Richard S. Muller |
1990 |
Ph.D. Dissertation |
|
Formation, Properties, and Applications of Porous Silicon |
Rolfe Anderson; Richard S. Muller |
1990 |
Ph.D. Dissertation |
|
IC-Processed Polysilicon Micromechanics: Technology, Material, and Devices |
Yu-Chong Tai; Richard S. Muller; Roger T. Howe |
1989 |
Ph.D. Dissertation |
|
Analysis and Characterization of the Vertical Carrier Domain Magnetometer |
Bret S. Burns; Richard S. Muller; Roger T. Howe |
1989 |
Master's Thesis |
|
Low Temperature Silicon-Silicon Bonding with Oxides |
Leslie A. Field; Richard S. Muller |
1988 |
Master's Thesis |
|
Reactive Ion Etching of Zinc Oxide and Indium-Tin-Oxide |
Eric Minami; Richard M. White; Roger T. Howe |
1988 |
Master's Thesis |
|
A Tactile Sensor Utilizing Light Coupling Between Optical Fibers |
Vadim Konradi |
1987 |
Master's Thesis |
|
Design, Theory, and Applications of Integrable Carrier-Domain Magnetometers |
Juan Goicolea; Richard S. Muller |
1986 |
Ph.D. Dissertation |
|
Pyroelectric ZnO Integrated Sensors |
Dennis L. Polla; Richard S. Muller; Richard M. White |
1985 |
Master's Thesis |
|
Integrated Silicon Electromechanical Vapor Sensor |
Roger T. Howe; Richard S. Muller; Richard M. White |
1984 |
Ph.D. Dissertation |
|
Integrated-Circuit-Compatible Electret and Condenser Ultrasonic Transducers |
Jonathan Bernstein; Richard M. White |
1983 |
Ph.D. Dissertation |
