NT24: High-Performance MEMS Capacitors


A set of MEMS based variable capacitors will be designed, fabricated, characterized and integrated into QUASAR’s free-space capacitive EEG sensor for ultra-sensitive charge measurement.

Project end date: 08/31/05

Dan McCormick
Ming Li
Publication date: 
February 1, 2005
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2005

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