NT18: MEMS RF Switch with Liquid Gallium Contacts


A self-healing MEMS RF switch, which utilizes liquid gallium contacts to take the place of the traditional metal-to-metal hard contacts, is proposed in this project. Electrostatic actuation is used to drive a silicon nitride diaphragm with upper electrodes. When the diaphragm is pulled down by the electrostatic force, small droplets of liquid gallium work as an interface between the upper and lower electrodes. The loss of the gallium droplets can be avoided due to the unwettability of the material surrounding the contact areas. In this project, hermit package and 1A DC current capability will be tested.

Project end date: 08/02/06

Publication date: 
February 6, 2006
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2006

*Only registered BSAC Industrial Members may view project materials & publications. Click here to request member-only access.