NT13: RF Dielectric Fluid Immersed Silicon MEMS Tunable Capacitors


The objective of this project is to develop micro-electromechanical tunable capacitors employing dielectric fluids. In the case of electrostatic, mechanically tunable capacitors the goal is to increase the capacitance per unit area and the tuning range, reduce the mechanical noise and also improve mechanical performance and long-term reliability.

Project end date: 08/18/04

Daniel T. McCormick
Publication date: 
February 12, 2004
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2004

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