LWL20: CMOS-Compatible Synthesis of Carbon Nanotubes for Sensor Applications


The goal of this project is to develop a microelectronics-compatible synthesis method and direct integration of carbon nanotubes into MEMS and CMOS for sensors applications. Electrical process control, compatible with automation and wafer-level production, has been implemented. The project is partially carried out within the collaboration program between Vestfold University College (Norway) and UC Berkeley which is funded by The Norwegian Centre for International Cooperation in Higher Education (SIU).

Project end date: 08/14/12

Bao Quoc Ta
Quoc-Huy Nguyen
Publication date: 
February 28, 2012
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2012

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