Our goal is to create an efficient system-level analysis tool for the simulation and design of complex MEMS. The program is to be readily accessible, easy to use and extend, and capable of giving speedy results for complex systems, including static, steady-state, transient, sensitivity, and bifurcation analysis results. We will also support higher-level programs for design optimization and synthesis. We will incorporate state-of-the-art numerical libraries, as well as integrating new numerical techniques, such as improved model reduction methods. We will also build software to capture measurements from optical tools, and compare those measurements to simulations. We will make our software freely available as a package accessible from MATLAB and as a web service.
Project end date: 02/01/05