BPNX1010: Foundry-Compatible Silicon Photonic MEMS Switch (New Project)


Integrated silicon photonic switches can serve as primary building blocks for low-latency, high-bandwidth interconnects for communication in data-intensive scenarios ranging from servers in datacenters to chiplets in multi-chip integrated packages. Our group has been developing MEMS-based large-scale silicon photonic switches which are particularly attractive for their low-loss, high-extinction, and low-power performance as well as sub-microsecond switching speed. Previous demonstrations, although fully compatible with CMOS foundries, relied upon a custom fabrication stack. The goal of the present project is to make the MEMS-based silicon photonic switch design compatible with the commercial silicon photonic foundry process with zero change to the design rules and minimal post-processing. 

Project is currently funded by: Industry Sponsored Research

Publication date: 
February 13, 2024
Publication type: 
BSAC Project Materials (Current)
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