Integrated silicon photonic switches enable routing of optical signals and real-time reconfiguration of the optical networks in data centers and high performance computers. Reducing the operating voltage while preserving the required switching properties is vital to realize their full potential for real-time routing driven by CMOS electronics. Silicon photonic MEMS switches, based on electrostatic actuation, have employed high voltages because of constraints in mechanical designs aimed at eliminating parasitic effects. On the other hand, recent developments in piezoelectric thin films have enabled higher energy density in piezoelectric materials, presenting a new possibility for stable actuation with minimal hysteresis and low driving voltage.
Project is currently funded by: Industry Sponsored Research