Abstract:
We propose a new multimaterial direct-write printing technique with projected sub-micron resolution. Inorganic nanoparticles (≈1-10nm) of common microfabrication materials are electrically charged, manipulated electromagnetically in vacuum with an ion trap, and shot toward a substrate where they deposit onto a part under construction, similar to PVD methods. To date, we have successfully demonstrated basic multimaterial deposition. Eventually, this ion printing technology could allow rapid prototyping of integrated circuits and MEMS.
Project ended: 12/20/2024
Publication date:
December 12, 2024
Publication type:
BSAC Project Materials (Final/Archive)
Citation:
PREPUBLICATION DATA - ©University of California 2024