BPN867: Fully Integrated CMOS-Metal MEMS Systems


As RF MEMS technology evolves to shift towards UHF frequencies, the parasitics inherent in hybrid fabrication approaches become the performance bottleneck. This project aims to integrate metal MEMS resonators directly over CMOS circuitry to achieve fully integrated MEMS systems. Pursuant to this goal, this project proposes several designs for UHF MEMS bandpass filters, exploring how different CMOS-compatible metals can yield performance metrics—such as quality-factor (Q), temperature stability and frequency drift—that are comparable to those of standard polysilicon MEMS resonators.

Project merged with BPN976 on 03/07/2023.

Publication date: 
August 18, 2022
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2022

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