BPN684: Integrated Microgyroscopes with Improved Scale-Factor and Bias Stability


Despite their small size, low power dissipation, and low cost, the large bias and scale factor errors of current MEMS inertial sensors preclude using them for dead reckoning navigation. Although these shortcomings can be overcome with precision manufacturing and extensive calibration, such solutions suffer from high cost and secondary effects such as long term drift. Presently, the use of in-situ calibration techniques in MEMS sensors is limited to the electronic interfaces, where they are instrumental for reducing drift arising from electronic components. This project extends the benefit of electronic background calibration to the MEMS transducer to continuously reduce scale factor and bias errors arising from manufacturing tolerances and drift.

Project end date: 01/04/16

Jason Su
Publication date: 
September 21, 2015
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2015

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